Automatic Wafer Handling System for PECVD Equipment

  Features  

·Modular design, with highly standardized components for internal similar structures, which is easy for spare part management;

·Touch screen + PLC control, the operation interface is simple and clear;

·Small process boat transfer & handling logic, with high throughput: ≥ 8000 pcs/h (182mm wafer);

·With pause function by highest access level to fully enhance the equipment safety redundancy;

·Industry mainstream detection system available (optional), to improve production yield;

·Compatible with AGV, FRID system to achieve automatic scheduling and tracking of cassettes & process carriers, and available for workshop-level management and scheduling of cassettes & process carriers through integration with MES system.