Horizontal Low Pressure Phosphorus Diffusion Equipment

  Features  

· Technical solutions for high sheet resistance.

· Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.

· Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.

· High-speed and stable integral module boat pushing mechanism.

· Intelligent automatic control.

· MES software with independent intellectual property rights.

· Matching S.C smart production management system.